日本理研氨气侦测器 GD-70D(NH3)
GD-70D传感器类型有ESU(定电位电解式)、SGU(半导体式)、SSU(热分解粒子式)、OSU(原电池式)、NCU(新陶瓷式),检测气体及量程如下:
OSU:O2,0~25%vol
NCU:CH4、H2、i-C4H10,0~100%LEL
SSU:TEOS、TMS、TRIMOS,0~15ppm
SGU:H2,0~500/1000/2000ppm;CH4、C3H8,0~2000/5000ppm;CH3OH,0~1000/2000ppm;C2H2Cl2,0~600ppm;CH2Cl2、CH3CHOHCH3、R-32、R-41、COS,0~2000ppm
ESU:NH3,0~75ppm;AsH3,0~0.2ppm;Br2,0~1ppm;CO,0~75/150/300ppm;Cl2,0~1.5/3ppm;ClF3,0~0.6ppm;B2H6,0~0.3ppm;Si2H6,0~15ppm;(CH3)2NH,0~15ppm;(CH3CH2)2NH,0~15ppm;F2,0~3ppm;GeH4,0~0.8ppm;HBr,0~6/9ppm;HCl,0~6/15ppm;HF,0~3/9ppm;H2Se,0~0.2ppm;CH3NH2,0~15ppm;NO,0~100ppm;NO2,0~15ppm;NF3,0~30ppm;O3,0~0.6ppm;PH3,0~1ppm;SiH4,0~15ppm;SO2,0~6ppm;(CH3)3N,0~15ppm;SbCl5、AsCl5、AsCl3、BCl3、SiH2Cl2、GeCl4、MoCl5、POCl3、PCl5、PCl3、SiCl4、SnCl4、SiHCl3、WCl6,0~6/15ppm;AsF5、AsF3、BF3、MoF6、PF5、SiF4、SF4、WF6,0~3/9ppm;BBr3,0~6/9ppm
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